ExLibris header image
SFX logo
Contains information about title and source of a journal
Title: Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films.
Source:

Journal of the Optical Society of America. A, Optics, image science, and vision [1084-7529] Chang, Yia-Chung yr:2006 vol:23 iss:3 pg:638 -645

Contains list of services for current record

ILL

service type icon, opens target in new window

Download Citation

service type icon, opens target in new window

Contact Us

service type icon, opens target in new window
service type icon, opens target in new window
service type icon, opens target in new window


© 2017 SFX by Ex Libris Inc.
CrossRef Enabled